Silicon Carbide CVD Coating

CVD = (Chemical Vapor Deposition)

Definition: Silicon carbide is a compound of Silicon and Carbon with chemical formula SiC. Today SiC coated graphite is widely used in high-temperature/high-voltage semiconductor electronics.

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Bay Carbon has established an unparalleled excellence in the production of precision machined high purity Semiconductor grade CVD silicon carbide coated graphite. We specialize in graphite carriers, susceptors, satellites, wafers and customized components focusing on the solar silica, LED, semiconductor, MOCVD, and CMOS industries. Our flexibility also enables us to render many possible configurations, catering to the research and development and academia arenas. The result is a high quality part that is virtually inert to all process gases and chemicals. Our process ensured an excellent CTE match between sub straight and coating causing greater stability and longer production cycle life.

 Advantages:

Excellent resistance to wear and abrasion

Excellent resistance to corrosion, oxidation and erosion

Outstanding performance at high operating temperatures 1400C (up to 1700 C in inert atmosphere)

Superior flatness capability

Non particle generating

Ultra-Pure Graphite Sub straight 99.9995%

Outstanding thermal conductivity

Dimensional Stability

Thermal Shock Resistant

Non-Porous

Our unique CVD process ensures a stoichiometric balanced reaction across the entire part!