Tantalum Carbide Coating

 

Definition: Tantalum Carbide is a compound of tantalum and carbon with a chemical formula TaC. The coating is an extremely hard, refractory ceramic material, with a metallic electrical conductivity. The melting point of Tantalum Carbides peaks at about 3880°C depending on purity and has one of the highest melting points among the binary compounds. This makes it an attractive alternative when higher temperature demands exceed performance capabilities of CVD Silicon carbide coated graphites.

 

 

 

TaC, coating resists chemical attack by corrosive liquids and gases at very high temperatures. They are finding increasing acceptance in sealing and protecting graphite hardware from hot ammonia, hydrogen, hydrochloric acid, and molten metals used in compound semiconductors epitaxial processes such as MOCVD and LPE. The following characteristics of the carbide coating provides long life and low particle generation.

Advantages:

Excellent resistance to wear and abrasion

Excellent resistance to corrosion, oxidation and erosion

Ultra-Pure Graphite Sub straight 99.9995%

Dimensional Stability

Thermal Shock Resistant

Non-Porous

Superior flatness capability

Uniform

Protective

Electrically Conductive

Conformal on Intricate Geometries