Silicon Carbide Coated Susceptors for CMOS & MOCVD

Bay Carbon has over 40 years of experience producing high purity, iso-molded graphite susceptors for CVD processes. All graphite for susceptor applications is purified using Bay Carbon proprietary purification technology and tested using DC Arc optical emission spectroscopy to insure purity levels that are consistent with semiconductor applications. The graphite susceptor products are available with a thermal coefficient matched CVD silicon carbide protective coating. Each SiC coated graphite susceptor is packaged in sealed clean room compatible poly-bags and shipped in protective enclosures in individual containers.